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ISP型无油涡旋式真空泵
上架时间:
2017-12-14

无油涡旋式真空泵

■无油涡旋式真空泵原理
无油滚动式真空泵原理
■无油滚动泵

无油式涡旋泵是一种在泵体内部的气体通路上全都不使用油,而且泵出口排气可直接与大气连通的一种机械式泵。是在80年代后期日本开发的、清洁且维护性能出色的泵,并以半导体产业为中心急速普及开来。根据压缩方式可分为基本型·特殊型·螺杆型·涡轮型·涡旋型等类。基本上是和空压机同样原理的机构。



■ 特点(Features)
■清洁排气・真空由于ISP真空泵的泵体不使用润滑油和封水,不存在润滑油的逆扩散,因而能获得干净的真空。As ISP vacuum pumps do not contain lubricating oil or sealing water resulting in no back-migration of fluid, it ensures clean vacuum. ■轻巧・紧凑采用双层重叠的独特设计,产品轻巧紧凑。It is light-weight and occupies minimum space because of original design called double wrap scroll. ■低振动・低噪音由于在旋转叶轮的1周期内,吸气·压缩·排气工序连续完成,因而压缩转矩的变动很小,实现低振荡·低噪音性能。While orbiting scroll makes one turn, the process of suction, compression and exhaust proceeds continuously, resulting in a minimum pulsation which provides less vibration and low noise. ■适用于广泛的压力领域采用双层重叠方式,动态非常稳定,可适用于从大气压到**压力的广泛压力领域。无论是大气压还是**压力的动力变化少,可实现大气・ 真空的重复连续运行。Due to double-wrap scroll design which is dynamically stable, ISP vacuum pumps can deal with a wide range of applications ranging from atmospheric pressure to the ultimate pressure. There is little power variance between atmospheric pressure and the ultimate pressure, which allows repeated continuous operation between atmospheric pressure and vacuum. ■新功能・新结构通过改进空气闪喷器功能・密封,提高了水蒸气·异物的排泄·耐久性·维护周期The Air Flush device has been added as a standard feature. Shaft seal configuration has also improved. Due to the Air Flush and the new shaft seal system, reliability and maintenance interval as well as evacuating performance of water vapor and small particles have been now remarkably improved.
■ ISP-250B/500B 规格(Specifications)
型号ModelISP-90 New设计排气速度DisplacementL/min(50/60Hz)90 / 108**压力Ultimate pressurePa {Torr}5 {3.8×10-2}电动机输出Motor powerkW0.15电压VoltageV单相Single phase100、115 / 200、230三相Three phase无噪音值Noise leveldB(A)52(at Air Flush 60)泄漏量Leak tightnessPa・L/s {mbar・L/s}1x10-2{1x10-4}重量Weightkg单相Single phase14三相Three phase无水蒸汽处理量Water vaporg/day5(at Air Flush)空气闪喷量Air-flushL/min7(at Air Flush)外形尺寸Dimensionsmm单相Single phase L308×W214×H225三相Three phase无吸气口径Inlet connectionNW25排气口径Outlet connectionNW16冷却方式 Cooling system空气冷却Air cooled标准配置Standard equipment空气安全闪喷器、计时器、附热电流保护(单相规格)Air Flush 、Hour counter,Thermally protected for single phase motor
型号ModelISP-250BISP-500B设计排气速度DisplacementL/min(50/60Hz)250/300500/600**压力Ultimate pressurePa {Torr}1.6 {1.2×10-2}1.0 {7.5×10-3}电动机输出Motor powerkW0.40.6电压VoltageV单相Single phase100、115 / 200、230三相Three phase200、208、230 / 380、415、460噪音值Noise leveldB(A)58(at Air Flush 66)60(at Air Flush 68)泄漏量Leak tightnessPa・L/s {mbar・L/s}1x10-2{1x10-4}重量Weightkg单相Single phase2544三相Three phase2338水蒸汽处理量Water vaporg/day25(at Air Flush)空气闪喷量Air-flushL/min10(at Air Flush)外形尺寸Dimensionsmm单相Single phase L400×W252×H336L443×W328×H372(L443×W298×H397)三相Three phaseL370×W252×H336L372×W328×H372(L372×W298×H397)吸气口径Inlet connectionNW25NW40排气口径Outlet connectionNW16NW25冷却方式 Cooling system空气冷却Air cooled标准配置Standard equipment空气安全闪喷器、计时器、附热电流保护(单相规格)Air Flush 、Hour counter,Thermally protected for single phase motor

・**压力是全程压力测量值。Ultimate pressure is measured as total pressure.
・噪音值是在无音室中的测量值。Noise is measured in an anechoic room.
・( )内尺寸为吸气口、排气口为纵向的情况。Figures in parentheses are dimensions when inlet and outlet are placed vertically.

■ 使用用途(Applications)
■喷镀装置、蒸镀装置・离子电镀装置(Sputtering equipment, Vacuum deposition equipment, lon plating equipment) ■加速器(Accelerator, Synchrotron Radiation)■表面修正装置、电子束加工机(Surface modification, Electron beam process)■真空溶解炉、真空热处理炉(Vacuum furnace, Heat treatment furnace)■气体循环・捕集装置  (Gas recovery devices)■理化实验用、分析机器用 用 (Laboratory use)■各种排气装置  (Vacuum equipment)■真空包装机  (Vacuum packaging machine)■He泄漏检测器  (Leak detectors)■其他 (Others)■真空吸附处理 (Device handling system)  
■安全注意事项(Precaution on Usage)
■这种真空泵是清洁排气规格。请不能排放对人体有毒的气体、爆炸火灾危险性的气体、腐蚀性气体、药品、溶剂、粉体等物质。对于排放了特殊气体等的泵本公司不承担维护保修责任,请予以谅解。 This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. will not perform maintenance work on pumps which have used hazardous substances.■使用环境温度应在5℃~40℃范围。 Use at ambient operation temperature in the range of 5℃ to 40℃.
■主要参数  (Specifications)
型号 ModelVTC-050VTC-150法兰内径Flange size吸气口 InletICF114ICF152排气口 OutletNW16NW16涡轮分子泵排气速度TMP pumping speedN2L/s50190H2L/s40160**压力  Ultimate pressurePa10-6台(无热烘 No baking)噪音 Noise leveldB(A)60粗辗真空泵  Foreline pumpISP-250B-SV输入电压  VoltageV单相 Single phase 100重量 Weightkg4954外形尺寸 DimensionsmmW 350×L 490×H 591W 350×L 490×H 638选项 Optional parts箱、真空计、自动阀等Chamber, Vacuum gauge, automatic value
型号 ModelVTU-050VTU-500法兰内径Flange size吸气口 InletICF114ICF203排气口 OutletNW16NW25涡轮分子泵排气速度TMP pumping speedN2L/s50550H2L/s40500**压力  Ultimate pressurePa10-6台(无热烘 No baking)噪音 Noise leveldB(A)5660粗辗真空泵  Foreline pumpISP-90ISP-500B-SV输入电压  VoltageV单相 Single phase 100重量 Weightkg2593外形尺寸 DimensionsmmW 350×L 340×H 285W 430×L 570×H 740选项 Optional parts箱、真空计、自动阀等Chamber, Vacuum gauge, automatic value

※当客户使用自己指定的涡轮分子泵组成高真空排气系统时,请询问相关事项。
If you have any preference of turbo molecular pump, it could be chosen.
在未指定时,按**重工业株式会社制造的涡轮分子泵配置。

■ 特点 (Features)
■干净排气・真空采用涡轮分子泵与无油涡旋式真空泵组合方式,完全干燥干净的高 真空排气系统。■结构紧凑由于非常紧凑且安装占地面积少,可在现在已使用中的装置近旁安装。且附脚轮便于移动。■操作性能好本高真空排气系统具有涡旋真空泵和涡轮分子泵分别单独运行的手动操作和一个按钮同时开始两泵运行的自动操作※等两种方式。可按用途选择。    ※在进行自动操作时,对包含箱和配管部件的容量有限制。 ■Clean Discharge and VacuumThis high vacuum pumping system is completely dry system because it consists of oil-free scroll vacuum pump (ISP) and turbob molecular pump (TMP).■Compact DesignSince this pumping system is compact design and footprint is minimized, it can be installed near your vacuum system. It is easy to move.■HandlingIts controller has two ways to start to run TMP, manually or automatically.※. It can be chosen by the application and preference.※ In the case of automatic start, it is restricted by volume of chamber and pipes. 
■选择项(Option)
■涡轮分子泵可用客户指定的涡轮分子泵组成高真空排气系统。请询问涡轮分子泵的的安装方向。■其他箱、真空计、自动阀等可选部分按您的需求安装。 ■Turbo Molecular PumpIf you have any preference of TMP, it could be chosen. Ask for TMP and installation direction of TMP.■OthersAsk for chamber, vacuum gauge and automatic valve because they are optional. 
■ 使用用途 (Applications)
■加速器(Accelerator)■X线分析装置  (X-ray Fluorescence Spectroscopy)■同步加速器放射 (Synchrotron Radiation) ■电子显微镜 (SEM/TEM)■泄漏测试  (Leak Test)■各种试验・分析装置 (Various Analyzers)■重量分析装置  (Mass Spectrometer)■辅助高 真空排气装置■表面分析装置  (Surface Analyzer)■其他 
■安全注意事项(Precaution on Usage)
■这种真空泵是清洁排气规格。请不能排放对人体有毒的气体、爆炸火灾危险性的气体、腐蚀性气体、药品、溶剂、粉状体等物质。对于排放了特殊气体等的泵本公司不承担维护保修责任,请予以谅解。■请在环境温度5℃~40℃范围内使用。希望将室、真空计、自动阀等一起同时安装。 ■This pumping system is suitable for clean processes only.Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles.  will not perform maintenance work on pumps which have used hazardous substances. ■Use at ambient operation temperature in the range of 5℃ to 40℃Ask for chamber, vacuum gauge and automatic valve because they are optional.
■ 特点(Features)■干净排气・真空由于DVSL真空泵的泵体不使用润滑油和封水,轴承等完全不与接气部位接触,因而能获得完全干燥、清洁的 真空,也没有油烟。As DVSL vacuum pumps do not contain lubricating oil or sealing water and no bearings through gas path, it ensures clean vacuum and no oil mist.■新功能・新结构在完全干式型的基础上,通过增加空气闪喷功能,提高了水蒸气·异物的排泄·耐久性·维护周期。The Air Flush device has been added as a standard feature as well as the original dry vacuum system. Reliability and maintenance interval as well as evacuating performance of water vapor and small particles have been now remarkably improved.■ DVSL-500B 规格(Specifications)型号Model DVSL-500BDVSL-501B设计排气速度Displacement L/min(50/60Hz)430 / 520**压力Ultimate pressure Pa {Torr}10 {7.5×10-2}30 {2.2×10-1}电动机输出Motor powerkW (50/60Hz)0.9 / 1.1电压VoltageV三相Three phase200、208、230 / 380、415、460噪音值Noise leveldB(A)65(at Air Flush 70)重量Weightkg5240水蒸气处理量Water vaporg/day250(at Air Flush)空气喷发量Air-flushl/min10(at Air Flush)外型尺寸DimensionsL503×W318×H361(392)L497×W313×H298吸气口径Inlet connectionNW25(内径 Inside Rc 1/2)排气口径Outlet connectionNW25冷却方式Cooling system空气冷却Air cooled标准配置Standard equipment空气闪喷器、计时器Air Flush 、Hour counter选项Option水挡水板消音器(Rc 1/2)Water separator & silencer・**压力是全程压力测量值。Ultimate pressure is measured as total pressure.・噪音值是在无音室中的测量值。Noise is measured in an anechoic room.■使用用途(Applications)■真空形成(Vacuum Forming)■真空冲洗干燥(仅水系)(Vacuum Drying only for water based)■脱泡·脱气(Deairater)■陶瓷业(Ceramic Industry)■真空吸附 (Vacuum Chuck)■气体置换(Gas Substitution)■Cry泵的粗辗・再生(Regeneration)■电子管真空(Pumping for Electron Tube)■真空冷却(Vacuum Cooling)   ■安全注意事项(Precaution on Usage)■这种真空泵是清洁排气规格。请不能排放对人体有毒的气体、爆炸火灾危险性的气体、腐蚀性气体、药品、溶剂、粉状体等物质。对于排放了特殊气体等的泵本公司不承担维护保修责任,请予以谅解。 This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles.  will not perform maintenance work on pumps which have used hazardous substances.■使用环境温度应在5℃~40℃范围。 Use at ambient operation temperature in the range of 5℃ to 40℃.



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